Lesker 3 Ebeam Evaporator Operation Protocol

Lesker 3 Operation Protocol

 

Outline:

A. Deposition material loading

B.Sample loading

C.Evaporation

 

 

A. Deposition material loading

  1. In case the software needs to be restarted; from the desktop, click on “Shortcut to Cware”, then “Login Here” and use “admin” for both the username and password.
  2. Select ”Start PC vent” to vent chamber.
  3. If necessary replace the plastic liner in the view window.

 

  1. Ensure that the amount of the material in the crucible liner is at the proper level. (Record the crucible weight before/after deposition and keep the crucible weight at a consistent range for a reproducible result)
  2. Inspect if there’s damage/contamination to the crucible liner.
  3. Load each source into a crucible position. Select the “Cru Pos #” buttons to rotate the hearth to a different position.
  4. Rename the material name on the screen with “Cru Pos #” accordingly.

B. Sample loading

  1. Fix copper cooling plate on the platen with 2 screws (only 2 screws will fit)
  2. Fix O2 plasma cleaned sample on the copper plate with Kapton tape
  3. Place the platen back to the chamber
  4. Close the door.
  5. Select the “Start PC Pump” button and note the time at which the recipe was started. Be sure to hold the door closed until the rough valve is automatically opened.

C. Deposition

  1. Pump down to at least 5 x 10-6 Torr.
  2. From the Windows Start Menu, launch the SQM 242 Rate Monitor Program.
  3. Select “File” then “Open”. A list of source materials will display. Select the desired source material and click “Open”.
  4. Verify that the density and Z-ratio are correct.
  5. Verify that the tooling factor is equal to 154.
  6. Select “Start” on the SQM program.
  7. Open the door containing the touch screen and press “RESET” button on the High Voltage Controller.
  8. Verify that all the interlock LED’s on the controller are ON/Green.
  9. Check that the Sweep Select is on Position “1” by verifying that LED is on.
  10. Close the door. Ensure the touch screen is displaying the deposition control screen by selecting the“Deposition” button.
  11. Ensure that the crucible position indicator is “Active” for the desired metal.
  12. Press the EB ON and then the EB HV ON
  13. Open the door containing the touch screen and ensure that the high voltage value is within ±0.1 of the value listed in table stuck on the panel. If the value is outside of those limits, then turn the high voltage OFF. Contact ASU NanoFab staff for assistance.
  14. Set the emission current ramp rate. The ramp rate is 05.
  15. Enter a set point (for beam current) of 2% and wait a couple of minute for the crucible to be preheated
  16. Using increments of 1% to 2% at a time, slowly increase the emission current value for low deposition pressure.
  17. Increase emission current until a rate around 5Å/sec is achieved. This current level should be close to the previous log, i.e. ±5%.
  18. select the “Ebeam Shutter” button to open the shutter and begin deposition on the sample.
  19. Immediately Select “Zero Sensor” on the SQM Rate monitor window to zero the total thickness.
  20. Halfway through the deposition, record the deposition pressure, deposition rate, emission set point and record these values in the run log.
  21. When deposition is complete, close the “Ebeam Shutter”.
  22. Set the ramp rate to “0.1”.
  23. Enter “0” into the Set Point. Wait until the current drops to zero before doing anything else. If the power supply is turned off too quickly, damage to the crucible is a high possibility and will trigger the interlock
  24. Press the “EB HV OFF” button and then the “EB OFF”
  25. Select “Stop” on the SQM Rate monitor window.
  26. If multiple layers are deposit, Stop the rate monitor, select the file for new material, and start again. If fail to do this the condition file won’t be renewed even if you can see it on the screen.
  27. Go back to step 12
  28. When the deposition is done, Wait 5 minutes for the emitter assembly to cool.
  29. Select the “Start PC Vent”
  30. Unload sample, copper-cooling plate.
  31. Replace the viewport liner for the next user.
  32. Select the “Start PC pump” button and ensure that the rough valve has opened before leaving the tool.
  33. On the iPad record “Run Completed” as being “Yes” on the “Tool In-Use” page.